Guangdong Wevio New Energy Co., Ltd
1200°C Single Temperature Zone CVD System Chemical Vapor Deposition Used for Lithium/Sodium
Wevio CVD System
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1200°C Single Temperature Zone CVD System Chemical Vapor Deposition Used for Lithium/Sodium
The CVD system consists of a gas supply system, tube furnace, and vacuum pumping system.
The maximum temperature can reach 1200°C, 1400°C, 1600°C, or 1700°C. The heating zones can be configured as single-zone, double-zone, or three-zone depending on requirements.
The ultimate vacuum can reach 10⁻³ Pa. The gas supply system uses flow regulation, which can be either a mass flow controller (MFC) or a float flowmeter (rotameter). The gas mixing lines can be configured with 2, 3, 4, or 5 gas channels for mixing.
Product Model: WV-CVD406-12
Quartz Tube Diameter: 50 / 60 / 80 / 100 / 120 / 150 mm
Rated Temperature: 1200°C / 1400°C / 1700°C
Power Supply: AC 220V / 50Hz
Temperature Control Accuracy: ±1°C
Product Description
The CVD system consists of a gas supply system, tube furnace, and vacuum pumping system.
The maximum temperature can reach 1200°C, 1400°C, 1600°C, or 1700°C.
The heating configuration can be single-zone, dual-zone, or three-zone depending on application requirements.
The ultimate vacuum can reach 10⁻³ Pa.
The gas supply system can use either a mass flow controller (MFC) or a rotameter (float flowmeter) for gas flow regulation.
The gas mixing system can be configured with 2, 3, 4, or 5 gas channels for mixed gas supply.
Product Features
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Integrated design optimizes the furnace structure and saves installation space.
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The furnace chamber uses polycrystalline mullite fiber insulation, which provides excellent thermal insulation and maintains structural stability at high temperatures.
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Double-layer shell structure with a forced air cooling system, keeping the outer surface temperature at ambient temperature +10°C.
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Equipped with an intelligent PID temperature controller with 30 programmable segments, allowing ramp temperature control, heating rate setting, soaking time control, and automatic shutdown.
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High temperature control accuracy:
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Within 1000°C: ±0.1°C
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Above 1000°C: ±1°C
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Safety protections include door-open power cut-off, over-temperature alarm, leakage protection, and overheat protection.
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Optional large-screen paperless recorder for real-time recording of heating curves, with a storage card for data analysis and printing of experimental data.
| Equipment Model | WV-CVD406-12 | |
| Performance | Temp Control Range | RT–1200℃ |
| Working Temp | ≤1100℃ | |
| Heating Zone Length | 400mm | |
| Temp Control Accuracy | ＜1000℃: ±0.1℃, ≥1000℃: ±1℃ | |
| Temp Stability | ±1℃ (tested at 1000℃) | |
| Heating Rate |
Recommended ≤10℃/min below 1000℃, Max heating rate ≤30℃/min |
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| Cooling Rate | Above 700℃≤10℃/min | |
| Furnace Surface Temp | Outer surface temperature ≤ Ambient +10℃(Tested at 1000℃) | |
| Structure | Outer Casing | Cold-rolled steel plate with corrosion-resistant coating |
| Furnace Chamber | Ceramic fiber insulation | |
| Temp Sensor | K-type thermocouple (1200℃) | |
| Heating Element | HDR high-quality resistance alloy wire | |
| Cooling Fan | Axial cooling fan | |
| Furnace Structure | Double-layer shell with forced air cooling system | |
| Controller | Control Mode | PID control |
| Setting / Display | Digital setting / Digital display | |
| Over-temp Protection | Integrated with controller | |
| Over-temp Setting | Digital setting | |
| Operation Modes | Manual operation/Program operation (30-segment programmable temperature control) | |
| Additional Functions | Temp deviation correction, Power failure compensation, Key lock function | |
| Timer | 1 min-99 hours 59 min or up to 999 hours 50 min digital setting, Automatic operation and quick automatic stop | |
| Vacuum System | Vacuum Level |
1.Optional mechanical pump: up to 10^-2Pa 2. Optional high-vacuum system (mechanical pump + molecular pump): up to 1.33×10^-4Pa (empty furnace condition) |
| Insulation Tube Plugs | 2 pcs, Al₂O₃ (alumina) material | |
| Furnace Tube | Quartz tube (Ø60mm×1000mm length) | |
| Vacuum Flange | Stainless steel vacuum flange | |
| Pressure Gauge | -0.1 to 0.15 MPa | |
| Gas Supply System | Mass Flow Controller (MFC) | Flow range & gas type:5–500SCCM or 1–10SLM(Flow range and gas type can be selected as required),Flow Control Accuracy:±1.0% F.S |
| Gas Lines | 1/2/3/4/5/6/7/8 lines (optional configuration) | |
| Fittings | Double ferrule stainless steel fittings | |
| Pressure & Vacuum Gauge | -0.1~0.15 Mpa, Resolution: 0.01 MPa/division | |
| Safety | Working Environment | RT +5 ~ 40℃ |
| Safety Protections | Door-open power cut-off, Over-temperature alarm, Leakage protection, Overheat protection | |
| Specifications | Furnace Type | Horizontal |
| Furnace Tube Size | Φ60 mm | |
| Power Supply | 220V/50Hz | |
| Input Power | 4 kW | |
| Optional Accessories | Mobile Furnace Stand | Material: Stainless Steel |
| Touchscreen Smart Controller |
1.50-segment programmable control Can connect to a computer 2.Enables remote control of single or multiple furnaces, Real-time monitoring, historical records, and report generation via dedicated software |
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Note:
Optional tube diameters: 50 / 60 / 80 / 100 / 120 / 150 / 200 / 300 mm
Heating zones can be configured as dual-zone, three-zone, or multi-zone according to requirements.
Contact Us
1st Floor, Building B, No. 10 Jiangfu Road, Xinzhuang Community, Matan Street, Guangming District, Shenzhen, Guangdong, China.
